Yoshimatsu Laboratory
PLD#1 (k-Pod)
Homemade, but many of the basic parts were purchased from the Pascal Co. Ltd.
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Substrate laser heating (>1300°C) with front and back pyrometers
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Ultimate vacuum: < 6x10^-9 Torr (with oxide target)
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Target mortion (6 targets + clear position) with twist mechanism VP 30 KeV RHEED, KSA analysis software
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Homemade load-lock (3 samples, 1 target)
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ICF152 Pac-Man (6 rotations of the shield) at the laser port
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Manual deposition (*Touch panel for target, remote control for mask, semi-automated PID control with temperature controller)
PLD#2 (new k-Pod)
Homemade (components procured individually from various suppliers)
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Substrate lamp heating (<850°C) - Temperature measurement using a backside thermocouple and a frontside pyrometer
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Ultimate vacuum: <5x10^-9 Torr (with oxide target)
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Target mortion (4 targets + clear position) with twist mechanism
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R-Dec 30 KeV RHEED, homemade analysis software (image + intensity oscillation)
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Load-lock mechanism (2 samples, 4 targets)
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ICF152 Pac-Man (6 rotations of shield)
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Automated control using a homemade LabVIEW program (no script)
Darkroom（Yellow room）
Custom-made purchased from Sigma Koki Co. Ltd.
The darkroom is permanently equipped with a microscope exposure device, spin coater, and hot plate. Equipped with a yellow light for photolithography processes.
Microscope exposure system
ARMS Systems UTA-IIIA
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Photolithography exposure system using a DLP projector
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microscope stage is modified for easy mask alignment
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Special low-magnification lens are attached for forming various sizes of devices.
Spin coater
ACE-200 Hisol Co. Ltd.
This is used for coating photolithography resist and depositing thin film materials.
Triple Hot Plate
AS ONE TH-900
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This is used for resist pre-bake, post-bake, and image-reversal bake.
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Three independent hot plates allow us to easily conduct the microprocessing by simply changing the positions of the hot plate.
Low-T Resistivity Measurement System
Homemade (Part of the hardware is made by Expp Co. Ltd.)
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Cooling down below 10 K using a Daikin UV202CL refrigerator
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LakeShore 331 temperature controller with two Si diode sensors
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One cartridge heater
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Simultaneous DC 4-probe measurement of two samples using a homemade automatic terminal switching box
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Automated measurement using a homemade LabVIEW program
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A homemade PCB for sample mounting
High-T resistivity measurement system
PPHL-800 Pascal Co. Ltd. (with a homemade software)
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Scientific Instruments Model 9700 temperature controller
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Keithley 2450 Source Meter
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DC 4-probe measurement
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Automated controlled by LabVIEW program from RT to 750 K
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Temperature is calibrated using FM-PM transition of Ni
DC Hall-effect measurement system
Homemade
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A GMW 3480 electromagnet (DC/AC magnetic field of ±1.2 T)
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A Matsusada Precision bipolar power supply POPF45-26.7-LEt
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Both hardware and software, are homemade.
*Currently, only room-temperature measurements are possible; in the future, a cooling apparatus below 10 K and heating apparatus above 600 K are installed to the system.
Sample Heating system for micro-observation
Homemade （sample surroundings is made by Expp Co. Ltd.）
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Silica windows at both top and back slides
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Automatic temperature control from RT to ~600 K.
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This is used for Raman spectroscopy measurements
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8 BNC terminals are available for electrical measurements
Various Electronics
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Source Meters (Keithley 2450 x 2)
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Lock-in Amplifier (NF LI5650)
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AC/DC Current Source (Lakeshore AC-155)
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Voltage-Controlled Current Source (SRS CS580)
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Oscilloscope (AS ONE) ）
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Function Generator (Pico test)
We possess various electronics and connect them appropriately to each equipment to conduct electrical experiments.
Computational Workstations #1 & 2
#1: Precision 7820 Tower #2:HP Z840
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They are used for DFT calculations using Quantum ESPRESSO in a local environment.
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Heavier calculations are conducted by using TSUBAME 4.0 supercomputer in Science Tokyo.
